Inventor
SERINO RUSSELL J
US3 patents
Patents
3 patentsUS5286599AFeb 15, 1994
Base developable negative photoresist composition and use thereof
IBM23 citations91
US5229251AJul 20, 1993
Dry developable photoresist containing an epoxide, organosilicon and onium salt
IBM15 citations81
US5457005AOct 10, 1995
Dry developable photoresist and use thereof
IBM14 citations72