Inventor
FIEGL BERNHARD
CH7 patents
⚠️ This page may combine multiple inventors who share the name “FIEGL BERNHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEICA GEOSYSTEMS AG
3 patentsIBM
2 patentsUS6103592AAug 15, 2000
Manufacturing self-aligned polysilicon fet devices isolated with maskless shallow trench isolation and gate conductor fill technology with active devices and dummy doped regions formed in mesas
IBM68 citations94
US5804490ASep 8, 1998
Method of filling shallow trenches
IBM27 citations91