Inventor

GLYNN SHANE

IE2 patents

⚠️ This page may combine multiple inventors who share the name “GLYNN SHANE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DANIELS STEPHEN

1 patent

US9842726B2Dec 12, 2017

Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate

DANIELS STEPHEN13 citations78

SOBERON FELIPE

1 patent

US8945467B2Feb 3, 2015

Method and apparatus for the sterilisation of articles

SOBERON FELIPE4 citations64