Inventor
Mitsui Ryo
JP8 patents
Patents
8 patentsUS11485824B2Nov 1, 2022
Thermosetting silicon-containing compound, composition for forming a silicon-containing film, and patterning process
SHINETSU CHEMICAL CO4 citations72
US10696779B2Jun 30, 2020
Silicon-containing compound, urethane resin, stretchable film, and method for forming the same
SHINETSU CHEMICAL CO2 citations72
US10717804B2Jul 21, 2020
Silicon-containing compound, urethane resin, stretchable film, and method for forming the same
SHINETSU CHEMICAL CO1 citations62
US12332565B2Jun 17, 2025
Thermosetting iodine- and silicon-containing material, composition containing the material for forming resist underlayer film for EUV lithography, and patterning process
SHINETSU CHEMICAL CO0 citations61
US11914295B2Feb 27, 2024
Thermosetting iodine- and silicon-containing material, composition containing the material for forming resist underlayer film for EUV lithography, and patterning process
SHINETSU CHEMICAL CO0 citations61
US10754248B2Aug 25, 2020
Sulfonium salt, resist composition, and patterning process
SHINETSU CHEMICAL CO1 citations61
US11215926B2Jan 4, 2022
Sulfonium compound, resist composition, and patterning process
SHINETSU CHEMICAL CO0 citations51
US10025180B2Jul 17, 2018
Sulfonium compound, resist composition, and patterning process
SHINETSU CHEMICAL CO1 citations51