Inventor
LEE YOUNG-KOO
KR10 patents
⚠️ This page may combine multiple inventors who share the name “LEE YOUNG-KOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS6179955B1Jan 30, 2001
Dry etching apparatus for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD344 citations98
US6464794B1Oct 15, 2002
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD75 citations94
US6797109B2Sep 28, 2004
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD7 citations71