Inventor

HSU KUANG-YUAN

TW82 patents

⚠️ This page may combine multiple inventors who share the name “HSU KUANG-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HSU KUANG-YUAN

TAIWAN SEMICONDUCTOR MFG CO LTD

Self aligned contact scheme

Self aligned contact scheme

System and method for supplying a precursor for an atomic layer deposition (ALD) process

Forming sidewall spacers using isotropic etch

Semiconductor device and a method for fabricating the same

Techniques providing metal gate devices with multiple barrier layers

Treatment system and method

Treatment system and method

Metal gate structure

Metal gate structure

Method of making a gate structure

Treatment to control deposition rate

Treatment system and method

Semiconductor device and a method for fabricating the same

Metal gate structure

System and method for supplying a precursor for an atomic layer deposition (ALD) process

Treatment to control deposition rate

Techniques providing metal gate devices with multiple barrier layers

Semiconductor device with metal gate

Doping for FinFET

Treatment system and method

Treatment to control deposition rate

Metal gate structure

Apparatus for manufacturing a thin film and a method therefor

Semiconductor device and a method for fabricating the same

Apparatus for manufacturing a thin film and a method therefor

TAIWAN SEMICONDUCTOR MFG

Method for metal gate N/P patterning

Method to form a semiconductor device having gate dielectric layers of varying thicknesses

Gate structures

Methods for a gate replacement process

Doping for FinFET

Techniques providing metal gate devices with multiple barrier layers

Metal gate fill and method of making

Method of making a gate structure

Gate dielectric of semiconductor device

Methods for a gate replacement process

LIM PENG-SOON

Method of fabricating gate structures

Metal gate structure

Method and system for metal gate formation with wider metal gate fill margin

LEE DA-YUAN

Modified profile gate structure for semiconductor device and methods of forming thereof

Replacement gate semiconductor device

Method of fabricating high-k/metal gate device

CHEN JIAN-HAO

Method of fabricating a plurality of gate structures

Method and apparatus of forming a gate

TSAU HSUEH WEN

Method of forming a metal gate

Yu xiong-fei

Techniques providing metal gate devices with multiple barrier layers

HSU KUANG-YUAN

Method to form a semiconductor device having gate dielectric layers of varying thickness

PLAYNITRIDE DISPLAY CO LTD

Patterned epitaxial substrate and semiconductor structure

LEE WEI-YANG

Stress modulation for metal gate semiconductor device

WISTRON NEWEB CORP

Ultra-reliable and low latency communications local breakout method and system for next generation radio access network