Inventor
BROGAN LEE J
US6 patents
Patents
6 patentsUS10329683B2Jun 25, 2019
Process for optimizing cobalt electrofill using sacrificial oxidants
LAM RES CORP2 citations68
US11208732B2Dec 28, 2021
Monitoring surface oxide on seed layers during electroplating
LAM RES CORP0 citations58
US10443146B2Oct 15, 2019
Monitoring surface oxide on seed layers during electroplating
LAM RES CORP1 citations58
US11078591B2Aug 3, 2021
Process for optimizing cobalt electrofill using sacrificial oxidants
LAM RES CORP0 citations57
US12012667B2Jun 18, 2024
Copper electrofill on non-copper liner layers
LAM RES CORP0 citations49
US12530021B2Jan 20, 2026
Performance predictors for semiconductor-manufacturing processes
LAM RES CORP0 citations47