Inventor

PENNINGTON BRYAN

US5 patents

⚠️ This page may combine multiple inventors who share the name “PENNINGTON BRYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US11208732B2Dec 28, 2021

Monitoring surface oxide on seed layers during electroplating

LAM RES CORP0 citations58

US10443146B2Oct 15, 2019

Monitoring surface oxide on seed layers during electroplating

LAM RES CORP1 citations58

US10358738B2Jul 23, 2019

Gap fill process stability monitoring of an electroplating process using a potential-controlled exit step

LAM RES CORP0 citations51

REID JONATHAN

1 patent

US8308931B2Nov 13, 2012

Method and apparatus for electroplating

REID JONATHAN62 citations93

PONNUSWAMY THOMAS A

1 patent

US8500983B2Aug 6, 2013

Pulse sequence for plating on thin seed layers

PONNUSWAMY THOMAS A20 citations88