Inventor
GLUKHOY YURI
US14 patents
⚠️ This page may combine multiple inventors who share the name “GLUKHOY YURI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLUKHOY YURI
6 patentsUS9484190B2Nov 1, 2016
Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large area
GLUKHOY YURI23 citations91
US7967945B2Jun 28, 2011
RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma
GLUKHOY YURI48 citations89
US9273393B2Mar 1, 2016
Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an object
GLUKHOY YURI6 citations71
US9275840B2Mar 1, 2016
Method for providing uniform distribution of plasma density in a plasma treatment apparatus
GLUKHOY YURI5 citations71
US10730239B1Aug 4, 2020
3D printing apparatus using a beam of an atmospheric pressure inductively coupled plasma generator
GLUKHOY YURI7 citations61
US8062470B2Nov 22, 2011
Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers
GLUKHOY YURI0 citations36
(unassigned)
3 patentsUS6803585B2Oct 12, 2004
Electron-cyclotron resonance type ion beam source for ion implanter
50 citations91
US6791079B2Sep 14, 2004
Mass spectrometer based on the use of quadrupole lenses with angular gradient of the electrostatic field
4 citations61
US6783629B2Aug 31, 2004
Plasma treatment apparatus with improved uniformity of treatment and method for improving uniformity of plasma treatment
6 citations61