Inventor

JAKOVLEV OLEG

DE2 patents

Patents

2 patents

US8975669B2Mar 10, 2015

Micromechanical sensor apparatus with a movable gate, and corresponding production process

BOSCH GMBH ROBERT4 citations68

US9764941B2Sep 19, 2017

Micromechanical sensor device with movable gate and corresponding production method

BOSCH GMBH ROBERT0 citations47