Inventor

TAKANO TOMOFUMI

JP2 patents

Patents

2 patents

US9905411B2Feb 27, 2018

Method for processing semiconductor wafer, method for manufacturing bonded wafer, and method for manufacturing epitaxial wafer

SHINETSU HANDOTAI KK0 citations35

US10692714B2Jun 23, 2020

Method for cleaning semiconductor wafer

SHINETSU HANDOTAI KK0 citations23