Inventor
BOYD JR WENDELL GLENN
US19 patents
Patents
19 patentsUS10648788B2May 12, 2020
Substrate distance monitoring
APPLIED MATERIALS INC337 citations98
US10460916B2Oct 29, 2019
Real time monitoring with closed loop chucking force control
APPLIED MATERIALS INC45 citations93
US10020218B2Jul 10, 2018
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC18 citations93
US10679885B2Jun 9, 2020
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC7 citations83
US11769683B2Sep 26, 2023
Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
APPLIED MATERIALS INC1 citations72
US10847402B2Nov 24, 2020
Bond protection around porous plugs
APPLIED MATERIALS INC4 citations72
US11114327B2Sep 7, 2021
ESC substrate support with chucking force control
APPLIED MATERIALS INC2 citations71
US11114326B2Sep 7, 2021
Substrate chucking and dechucking methods
APPLIED MATERIALS INC6 citations71
US10654147B2May 19, 2020
Polishing of electrostatic substrate support geometries
APPLIED MATERIALS INC5 citations71
US12424413B2Sep 23, 2025
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11915913B2Feb 27, 2024
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11676802B2Jun 13, 2023
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11476146B2Oct 18, 2022
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC0 citations61
US12074052B2Aug 27, 2024
Forming mesas on an electrostatic chuck
APPLIED MATERIALS INC0 citations60
US11699611B2Jul 11, 2023
Forming mesas on an electrostatic chuck
APPLIED MATERIALS INC1 citations60
US11648639B2May 16, 2023
Polishing jig assembly for a new or refurbished electrostatic chuck
APPLIED MATERIALS INC0 citations60
US11054317B2Jul 6, 2021
Method and apparatus for direct measurement of chucking force on an electrostatic chuck
APPLIED MATERIALS INC0 citations59
US11854911B2Dec 26, 2023
Methods, systems, and apparatus for conducting chucking operations using an adjusted chucking voltage if a process shift occurs
APPLIED MATERIALS INC0 citations49
US12322633B2Jun 3, 2025
Electrostatic chuck with improved temperature control
APPLIED MATERIALS INC0 citations45