Inventor

KOMACHI KYOICHI

JP4 patents

Patents

4 patents

US5545258AAug 13, 1996

Microwave plasma processing system

SUMITOMO METAL IND49 citations91

US5529632AJun 25, 1996

Microwave plasma processing system

SUMITOMO METAL IND26 citations91

US5645644AJul 8, 1997

Plasma processing apparatus

SUMITOMO METAL IND46 citations89

US5788798AAug 4, 1998

Plasma processing apparatus

SUMITOMO METAL IND7 citations69