Inventor
Treadwell Jason Lee
US4 patents
Patents
4 patentsUS10699878B2Jun 30, 2020
Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring
LAM RES CORP12 citations83
US10825659B2Nov 3, 2020
Substrate processing chamber including multiple gas injection points and dual injector
LAM RES CORP8 citations79
US11495486B2Nov 8, 2022
Integrated tool lift
LAM RES CORP2 citations67
US12027411B2Jul 2, 2024
Integrated tool lift
LAM RES CORP0 citations56