Inventor
CHEN SHIH-CHUNG
US51 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHIH-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
25 patentsUS10014185B1Jul 3, 2018
Selective etch of metal nitride films
APPLIED MATERIALS INC22 citations92
US10790287B2Sep 29, 2020
Reducing gate induced drain leakage in DRAM wordline
APPLIED MATERIALS INC12 citations86
US9914999B2Mar 13, 2018
Oxidized showerhead and process kit parts and methods of using same
APPLIED MATERIALS INC10 citations84
US11552082B2Jan 10, 2023
Reducing gate induced drain leakage in DRAM wordline
APPLIED MATERIALS INC2 citations73
US10608097B2Mar 31, 2020
Low thickness dependent work-function nMOS integration for metal gate
APPLIED MATERIALS INC2 citations73
US9748354B2Aug 29, 2017
Multi-threshold voltage structures with a lanthanum nitride film and methods of formation thereof
APPLIED MATERIALS INC5 citations73
US8987080B2Mar 24, 2015
Methods for manufacturing metal gates
APPLIED MATERIALS INC4 citations73
US11658218B2May 23, 2023
P-type dipole for p-FET
APPLIED MATERIALS INC2 citations72
US11289579B2Mar 29, 2022
P-type dipole for p-FET
APPLIED MATERIALS INC4 citations72
US11245022B2Feb 8, 2022
Integrated dipole flow for transistor
APPLIED MATERIALS INC2 citations72
US10872763B2Dec 22, 2020
Treatments to enhance material structures
APPLIED MATERIALS INC5 citations71
US9145612B2Sep 29, 2015
Deposition of N-metal films comprising aluminum alloys
APPLIED MATERIALS INC3 citations63
US11996455B2May 28, 2024
P-type dipole for P-FET
APPLIED MATERIALS INC0 citations62
US11171047B2Nov 9, 2021
Fluorine-doped nitride films for improved high-k reliability
APPLIED MATERIALS INC0 citations62
US11062900B2Jul 13, 2021
Method of reducing effective oxide thickness in a semiconductor structure
APPLIED MATERIALS INC1 citations62
US12328872B2Jun 10, 2025
Liner for V-NAND word line stack
APPLIED MATERIALS INC0 citations61
US11888045B2Jan 30, 2024
Integrated dipole flow for transistor
APPLIED MATERIALS INC0 citations61
US11776980B2Oct 3, 2023
Methods for reflector film growth
APPLIED MATERIALS INC0 citations61
US11476267B2Oct 18, 2022
Liner for V-NAND word line stack
APPLIED MATERIALS INC0 citations61
US11075276B2Jul 27, 2021
Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors
APPLIED MATERIALS INC1 citations60
US10665450B2May 26, 2020
Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films
APPLIED MATERIALS INC0 citations52
US9683287B2Jun 20, 2017
Deposition of films comprising aluminum alloys with high aluminum content
APPLIED MATERIALS INC0 citations52
US12062545B2Aug 13, 2024
Fluorine-free tungsten ALD for dielectric selectivity improvement
APPLIED MATERIALS INC0 citations49
US12588443B2Mar 24, 2026
Methods for forming low resistivity contacts
APPLIED MATERIALS INC0 citations48
US12305278B2May 20, 2025
Method of reducing titanium nitride etching during tungsten film formation
APPLIED MATERIALS INC0 citations48
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11020837B2Jun 1, 2021
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12427622B2Sep 30, 2025
Polishing pad conditioning apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11618126B2Apr 4, 2023
Polishing pad conditioning apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12311498B2May 27, 2025
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11919126B2Mar 5, 2024
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12202094B2Jan 21, 2025
System and method for chemical mechanical polishing pad replacement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11975421B2May 7, 2024
Single bodied platen housing a detection module for CMP systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11571782B2Feb 7, 2023
Single bodied platen housing a detection module for CMP systems
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US12138735B2Nov 12, 2024
Multi-layered windows for use in chemical-mechanical planarization systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
CHEN SHIH CHUNG
6 patentsUS5239687AAug 24, 1993
Wireless intercom having a transceiver in which a bias current for the condenser microphone and the driving current for the speaker are used to charge a battery during transmission and reception, respectively
CHEN SHIH CHUNG88 citations96
US9300151B2Mar 29, 2016
Wireless charging device
CHEN SHIH CHUNG12 citations82
US9252610B2Feb 2, 2016
Power charging socket
CHEN SHIH CHUNG12 citations82
US5238281AAug 24, 1993
Car capable of showing video images
CHEN SHIH CHUNG19 citations82
US5255418AOct 26, 1993
Automatically locking slider for concealed zipper
CHEN SHIH CHUNG19 citations73
US8766486B2Jul 1, 2014
Non-resonance wireless power device
CHEN SHIH CHUNG0 citations39
GANGULI SESHADRI
2 patentsTAIWAN SEMICONDUCTOR MFG
1 patentCHEN SHIH-CHUNG
1 patent(unassigned)
1 patentSUN CHEMICAL CORP
1 patentASTA OPTICAL CO INC
1 patentLU XINLIANG
1 patentCHEN CHI HSIANG INDUSTRY LTD
1 patentGREEN HYDROTEC INC
1 patentShowing the top 50 of 51 patents by PatentIndex Score.