Inventor
SWENBERG JOHANES
US19 patents
⚠️ This page may combine multiple inventors who share the name “SWENBERG JOHANES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS8008166B2Aug 30, 2011
Method and apparatus for cleaning a substrate surface
APPLIED MATERIALS INC236 citations98
US6019839AFeb 1, 2000
Method and apparatus for forming an epitaxial titanium silicide film by low pressure chemical vapor deposition
APPLIED MATERIALS INC73 citations95
US7601648B2Oct 13, 2009
Method for fabricating an integrated gate dielectric layer for field effect transistors
APPLIED MATERIALS INC89 citations94
US7910497B2Mar 22, 2011
Method of forming dielectric layers on a substrate and apparatus therefor
APPLIED MATERIALS INC27 citations91
US7972933B2Jul 5, 2011
Method of selective nitridation
APPLIED MATERIALS INC7 citations83
US9514968B2Dec 6, 2016
Methods and apparatus for selective oxidation of a substrate
APPLIED MATERIALS INC3 citations72
US10872763B2Dec 22, 2020
Treatments to enhance material structures
APPLIED MATERIALS INC5 citations71
US7813895B2Oct 12, 2010
Methods for plasma matching between different chambers and plasma stability monitoring and control
APPLIED MATERIALS INC7 citations71
US9048190B2Jun 2, 2015
Methods and apparatus for processing substrates using an ion shield
APPLIED MATERIALS INC2 citations62
US11271097B2Mar 8, 2022
Cap oxidation for FinFET formation
APPLIED MATERIALS INC0 citations60
US12473644B2Nov 18, 2025
Growth of thin oxide layer with silicon nitride and conversion
APPLIED MATERIALS INC0 citations58
US8993458B2Mar 31, 2015
Methods and apparatus for selective oxidation of a substrate
APPLIED MATERIALS INC0 citations51
US9530898B2Dec 27, 2016
Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof
APPLIED MATERIALS INC0 citations49