P

Inventor

SCHATZ KENNETH D

US26 patents
⚠️ This page may combine multiple inventors who share the name “SCHATZ KENNETH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

15 patents
US10903054B2Jan 26, 2021

Multi-zone gas distribution systems and methods

APPLIED MATERIALS INC5 citations81
US10593560B2Mar 17, 2020

Magnetic induction plasma source for semiconductor processes and equipment

APPLIED MATERIALS INC3 citations73
US11581165B2Feb 14, 2023

Multi-zone gas distribution systems and methods

APPLIED MATERIALS INC1 citations70
US11373845B2Jun 28, 2022

Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes

APPLIED MATERIALS INC2 citations68
US11915911B2Feb 27, 2024

Two piece electrode assembly with gap for plasma control

APPLIED MATERIALS INC1 citations62
US11894217B2Feb 6, 2024

Plasma ignition optimization in semiconductor processing chambers

APPLIED MATERIALS INC0 citations62
US11587765B2Feb 21, 2023

Plasma ignition optimization in semiconductor processing chambers

APPLIED MATERIALS INC1 citations62
US10699879B2Jun 30, 2020

Two piece electrode assembly with gap for plasma control

APPLIED MATERIALS INC1 citations62
US12148597B2Nov 19, 2024

Multi-zone gas distribution systems and methods

APPLIED MATERIALS INC0 citations60
US11901161B2Feb 13, 2024

Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes

APPLIED MATERIALS INC0 citations57
US11557464B2Jan 17, 2023

Semiconductor chamber coatings and processes

APPLIED MATERIALS INC0 citations52
US12575360B2Mar 10, 2026

Semiconductor processing chamber adapter

APPLIED MATERIALS INC0 citations51
US11715625B2Aug 1, 2023

Semiconductor processing chamber

APPLIED MATERIALS INC0 citations46
US12476094B2Nov 18, 2025

Model-based characterization of plasmas in semiconductor processing systems

APPLIED MATERIALS INC0 citations44
US9922840B2Mar 20, 2018

Adjustable remote dissociation

APPLIED MATERIALS INC0 citations41

ALIEN TECHNOLOGY CORP

9 patents

INTEL CORP

1 patent

RUIZHANG TECH LTD COMPANY

1 patent