Inventor
SCHATZ KENNETH D
US26 patents
⚠️ This page may combine multiple inventors who share the name “SCHATZ KENNETH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS10903054B2Jan 26, 2021
Multi-zone gas distribution systems and methods
APPLIED MATERIALS INC5 citations81
US10593560B2Mar 17, 2020
Magnetic induction plasma source for semiconductor processes and equipment
APPLIED MATERIALS INC3 citations73
US11581165B2Feb 14, 2023
Multi-zone gas distribution systems and methods
APPLIED MATERIALS INC1 citations70
US11373845B2Jun 28, 2022
Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes
APPLIED MATERIALS INC2 citations68
US11915911B2Feb 27, 2024
Two piece electrode assembly with gap for plasma control
APPLIED MATERIALS INC1 citations62
US11894217B2Feb 6, 2024
Plasma ignition optimization in semiconductor processing chambers
APPLIED MATERIALS INC0 citations62
US11587765B2Feb 21, 2023
Plasma ignition optimization in semiconductor processing chambers
APPLIED MATERIALS INC1 citations62
US10699879B2Jun 30, 2020
Two piece electrode assembly with gap for plasma control
APPLIED MATERIALS INC1 citations62
US12148597B2Nov 19, 2024
Multi-zone gas distribution systems and methods
APPLIED MATERIALS INC0 citations60
US11901161B2Feb 13, 2024
Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes
APPLIED MATERIALS INC0 citations57
US11557464B2Jan 17, 2023
Semiconductor chamber coatings and processes
APPLIED MATERIALS INC0 citations52
US12575360B2Mar 10, 2026
Semiconductor processing chamber adapter
APPLIED MATERIALS INC0 citations51
US11715625B2Aug 1, 2023
Semiconductor processing chamber
APPLIED MATERIALS INC0 citations46
US12476094B2Nov 18, 2025
Model-based characterization of plasmas in semiconductor processing systems
APPLIED MATERIALS INC0 citations44
US9922840B2Mar 20, 2018
Adjustable remote dissociation
APPLIED MATERIALS INC0 citations41
ALIEN TECHNOLOGY CORP
9 patentsUS7244326B2Jul 17, 2007
Transfer assembly for manufacturing electronic devices
ALIEN TECHNOLOGY CORP153 citations99
US7253735B2Aug 7, 2007
RFID tags and processes for producing RFID tags
ALIEN TECHNOLOGY CORP95 citations98
US7489248B2Feb 10, 2009
RFID tags and processes for producing RFID tags
ALIEN TECHNOLOGY CORP74 citations97
US6731353B1May 4, 2004
Method and apparatus for transferring blocks
ALIEN TECHNOLOGY CORP248 citations97
US7931063B2Apr 26, 2011
Transfer assembly for manufacturing electronic devices
ALIEN TECHNOLOGY CORP38 citations93
US7542301B1Jun 2, 2009
Creating recessed regions in a substrate and assemblies having such recessed regions
ALIEN TECHNOLOGY CORP85 citations93
US7868766B2Jan 11, 2011
RFID tags and processes for producing RFID tags
ALIEN TECHNOLOGY CORP21 citations92
US8912907B2Dec 16, 2014
RFID tags and processes for producing RFID tags
ALIEN TECHNOLOGY CORP4 citations83
US8350703B2Jan 8, 2013
RFID tags and processes for producing RFID tags
ALIEN TECHNOLOGY CORP7 citations81