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Inventor
JONATHAN JOSEPH ANTONY
US
2 patents
Patents
2 patents
US11241718B2
Feb 8, 2022
Cleaning components and methods in a plating system
APPLIED MATERIALS INC
0 citations
57
US12094740B2
Sep 17, 2024
Automated dry-in dry-out dual side polishing of silicon substrates with integrated spin rinse dry and metrology
APPLIED MATERIALS INC
0 citations
52