Inventor

TABATA AKI

JP3 patents

Patents

3 patents

US5167158ADec 1, 1992

Semiconductor film pressure sensor and method of manufacturing same

KOMATSU MFG CO LTD37 citations90

US5191798AMar 9, 1993

Pressure sensor

KOMATSU MFG CO LTD20 citations80

US10147339B2Dec 4, 2018

Evaluation apparatus and evaluation method

KOMATSU MFG CO LTD5 citations68