Inventor

RUMPF HOLGER

DE3 patents

Patents

3 patents

US12031820B2Jul 9, 2024

Micromechanical system, method for operating a micromechanical system

BOSCH GMBH ROBERT0 citations57

US11261082B2Mar 1, 2022

Micromechanical device and method for manufacturing a micromechanical device

BOSCH GMBH ROBERT0 citations56

US12509346B2Dec 30, 2025

Laser sealing methods for closing ventholes of micromecahnical devices

BOSCH GMBH ROBERT0 citations54