Inventor
BREITLING ACHIM
DE12 patents
Patents
12 patentsUS10029911B2Jul 24, 2018
Micromechanical component including a diffusion stop channel
BOSCH GMBH ROBERT4 citations71
US9890035B2Feb 13, 2018
Method for manufacturing a micromechanical component
BOSCH GMBH ROBERT4 citations71
US11261082B2Mar 1, 2022
Micromechanical device and method for manufacturing a micromechanical device
BOSCH GMBH ROBERT0 citations56
US10928462B2Feb 23, 2021
Magnetic field sensor and method for measuring an external magnetic field
BOSCH GMBH ROBERT0 citations56
US10023460B2Jul 17, 2018
Structures for reducing and avoiding stresses on the seal bottom side during laser reseal
BOSCH GMBH ROBERT1 citations50
US10793428B2Oct 6, 2020
Sensor element having laser-activated getter material
BOSCH GMBH ROBERT0 citations49
US10384932B2Aug 20, 2019
Device including micromechanical components in cavities having different pressures and method for its manufacture
BOSCH GMBH ROBERT0 citations48
US10752498B2Aug 25, 2020
MEMS component having two different internal pressures
BOSCH GMBH ROBERT0 citations40
US10183861B2Jan 22, 2019
Laser reseal including a protective structure
BOSCH GMBH ROBERT0 citations39
US10059583B2Aug 28, 2018
Micro-mechanical component
BOSCH GMBH ROBERT0 citations34
US9927497B2Mar 27, 2018
Sensor apparatus, production method for a sensor apparatus having at least one magnetic core and method for determining a field strength of a magnetic field in at least one spatial direction
BOSCH GMBH ROBERT0 citations34
US9778323B2Oct 3, 2017
Magnetic sensor device and manufacturing method for a magnetic sensor device
BOSCH GMBH ROBERT0 citations33