Inventor

FREISCHLAD KLAUS REINHARD

US2 patents

⚠️ This page may combine multiple inventors who share the name “FREISCHLAD KLAUS REINHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US7605913B2Oct 20, 2009

System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece

KLA TENCOR CORP7 citations79

BILLS RICHARD EARL

1 patent

US8330947B2Dec 11, 2012

Back quartersphere scattered light analysis

BILLS RICHARD EARL2 citations68