Inventor
ROTSCH CHRISTIAN
DE6 patents
⚠️ This page may combine multiple inventors who share the name “ROTSCH CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
5 patentsUS7385676B2Jun 10, 2008
Mask set having separate masks to form different regions of integrated circuit chips, exposure system including the mask set with an aperture device, and method of using the mask set to expose a semiconductor wafer
INFINEON TECHNOLOGIES AG4 citations58
US7307715B2Dec 11, 2007
Method for the formation of a structure size measured value
INFINEON TECHNOLOGIES AG3 citations58
US6628409B2Sep 30, 2003
Method for determining the distance between periodic structures on an integrated circuit or a photomask
INFINEON TECHNOLOGIES AG4 citations58
US7124379B2Oct 17, 2006
Method for communicating a measuring position of a structural element that is to be formed on a mask
INFINEON TECHNOLOGIES AG4 citations55
US6552331B2Apr 22, 2003
Device and method for combining scanning and imaging methods in checking photomasks
INFINEON TECHNOLOGIES AG1 citations48