Inventor

NAKAO SHOJI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NAKAO SHOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO MITSUBISHI SILICON

1 patent

US7029380B2Apr 18, 2006

Double-side polishing method and apparatus

SUMITOMO MITSUBISHI SILICON33 citations88

FUKUSHIMA HIROTO

1 patent

US8870627B2Oct 28, 2014

Polishing method and polishing apparatus

FUKUSHIMA HIROTO2 citations57