Inventor
WELCH JAMES
US24 patents
⚠️ This page may combine multiple inventors who share the name “WELCH JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
5 patentsUS7475588B2Jan 13, 2009
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS474 citations98
US7296460B2Nov 20, 2007
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS481 citations98
US7080545B2Jul 25, 2006
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS495 citations98
US7296458B2Nov 20, 2007
Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
ADVANCED TECH MATERIALS21 citations92
US7228724B2Jun 12, 2007
Apparatus and process for sensing target gas species in semiconductor processing systems
ADVANCED TECH MATERIALS19 citations92