Inventor
CUNNINGHAM KEVIN LAUGHTON
US5 patents
Patents
5 patentsUS10948818B2Mar 16, 2021
Methods and apparatus for creating a large area imprint without a seam
APPLIED MATERIALS INC2 citations69
US12140864B2Nov 12, 2024
Large area seamless master and imprint stamp manufacturing method
APPLIED MATERIALS INC0 citations59
US11774851B2Oct 3, 2023
Methods and apparatus for creating a large area imprint without a seam
APPLIED MATERIALS INC0 citations59
US11829073B2Nov 28, 2023
Large area self imaging lithography based on broadband light source
APPLIED MATERIALS INC0 citations58
US11036145B2Jun 15, 2021
Large area self imaging lithography based on broadband light source
APPLIED MATERIALS INC0 citations58