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Inventor
JEONG YOO JIN
KR
2 patents
Patents
2 patents
US10115640B2
Oct 30, 2018
Method of manufacturing integrated circuit device
SAMSUNG ELECTRONICS CO LTD
7 citations
80
US10474133B2
Nov 12, 2019
Inspection device for inspecting wafer and method of inspecting wafer using the same
SAMSUNG ELECTRONICS CO LTD
3 citations
69