Inventor
DUBOSE CHELSEA
US12 patents
Patents
12 patentsUS11094507B2Aug 17, 2021
Power generation systems and methods for plasma stability and control
TOKYO ELECTRON LTD13 citations84
US11600474B2Mar 7, 2023
RF voltage and current (V-I) sensors and measurement methods
TOKYO ELECTRON LTD6 citations74
US11410832B2Aug 9, 2022
RF measurement system and method
TOKYO ELECTRON LTD2 citations73
US11817296B2Nov 14, 2023
RF voltage and current (V-I) sensors and measurement methods
TOKYO ELECTRON LTD2 citations72
US11050394B2Jun 29, 2021
Modules, multi-stage systems, and related methods for radio frequency power amplifiers
TOKYO ELECTRON LTD4 citations72
US12224164B2Feb 11, 2025
Radio frequency (RF) system with embedded RF signal pickups
TOKYO ELECTRON LTD0 citations62
US12176183B2Dec 24, 2024
RF voltage and current (V-I) sensors and measurement methods
TOKYO ELECTRON LTD0 citations62
US11393663B2Jul 19, 2022
Methods and systems for focus ring thickness determinations and feedback control
TOKYO ELECTRON LTD1 citations62
US12074390B2Aug 27, 2024
Parallel resonance antenna for radial plasma control
TOKYO ELECTRON LTD1 citations61
US11721524B2Aug 8, 2023
Power generation systems and methods for plasma stability and control
TOKYO ELECTRON LTD0 citations61
US10510512B2Dec 17, 2019
Methods and systems for controlling plasma performance
TOKYO ELECTRON LTD1 citations59
US12272520B2Apr 8, 2025
Process control enabled VDC sensor for plasma process
TOKYO ELECTRON LTD0 citations51