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Inventor
KAMNA MARILYN
US
2 patents
Patents
2 patents
US6485869B2
Nov 26, 2002
Photomask frame modification to eliminate process induced critical dimension control variation
INTEL CORP
31 citations
90
US6692878B2
Feb 17, 2004
Photomask frame modification to eliminate process induced critical dimension control variation
INTEL CORP
7 citations
71