Inventor
MENZIE MARK D
US3 patents
Patents
3 patentsUS6777045B2Aug 17, 2004
Chamber components having textured surfaces and method of manufacture
APPLIED MATERIALS INC63 citations92
US7026009B2Apr 11, 2006
Evaluation of chamber components having textured coatings
APPLIED MATERIALS INC61 citations90
US6933025B2Aug 23, 2005
Chamber having components with textured surfaces and method of manufacture
APPLIED MATERIALS INC32 citations88