Inventor
CHEN YEN-HSUN
TW20 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YEN-HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS11029613B2Jun 8, 2021
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10719020B2Jul 21, 2020
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11698591B2Jul 11, 2023
System and method of discharging an EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11687011B2Jun 27, 2023
Reticle carrier and associated methods
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12189311B2Jan 7, 2025
Reticle carrier and associated methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11644759B2May 9, 2023
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11153958B2Oct 19, 2021
Extreme ultraviolet photolithography method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11134558B2Sep 28, 2021
Droplet generator assembly and method for using the same and radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10779387B2Sep 15, 2020
Extreme ultraviolet photolithography system and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10514167B1Dec 24, 2019
Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12316828B2May 27, 2025
Automatic time delay and integration (TDI) mask inspection system calibration
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US10684009B2Jun 16, 2020
Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51