Inventor
KUDO KATSUYOSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KUDO KATSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS4795529AJan 3, 1989
Plasma treating method and apparatus therefor
HITACHI LTD184 citations97
US5961850AOct 5, 1999
Plasma processing method and apparatus
HITACHI LTD41 citations92
US4936967AJun 26, 1990
Method of detecting an end point of plasma treatment
HITACHI LTD30 citations92
US5085750AFeb 4, 1992
Plasma treating method and apparatus therefor
HITACHI LTD34 citations91
US4911812AMar 27, 1990
Plasma treating method and apparatus therefor
HITACHI LTD47 citations90
US5861601AJan 19, 1999
Microwave plasma processing apparatus and method
HITACHI LTD45 citations88
US5647944AJul 15, 1997
Microwave plasma treatment apparatus
HITACHI LTD21 citations88
US4664767AMay 12, 1987
Plasma treating method and apparatus therefor
HITACHI LTD8 citations69