Inventor
GKOROU DIMITRA
NL6 patents
Patents
6 patentsUS11099486B2Aug 24, 2021
Generating predicted data for control or monitoring of a production process
ASML NETHERLANDS BV3 citations70
US11520238B2Dec 6, 2022
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11150562B2Oct 19, 2021
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US12353967B2Jul 8, 2025
Method and apparatus for determining feature contribution to performance
ASML NETHERLANDS BV0 citations53
US11579534B2Feb 14, 2023
Extracting a feature from a data set
ASML NETHERLANDS BV0 citations53
US11740560B2Aug 29, 2023
Method for determining an inspection strategy for a group of substrates in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations51