Inventor

BLOMBERG TOM E

FI52 patents

⚠️ This page may combine multiple inventors who share the name “BLOMBERG TOM E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BLOMBERG TOM E

ASM IP HOLDING BV

Combination CVD/ALD method, source and pulse profile modification

Silane and borane treatments for titanium carbide films

Selective deposition on metal or metallic surfaces relative to dielectric surfaces

Thermal atomic layer etching processes

Atomic layer etching processes

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Deposition of smooth metal nitride films

Thermal atomic layer etching processes

Showerhead device for semiconductor processing system

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Photoactive devices and materials

Combination CVD/ALD method, source and pulse profile modification

Atomic layer etching processes

Thermal atomic layer etching processes

Deposition of smooth metal nitride films

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Showerhead device for semiconductor processing system

Atomic layer etching processes

Atomic layer deposition of III-V compounds to form V-NAND devices

Showerhead device for semiconductor processing system

Atomic layer etching processes

Atomic layer deposition of III-V compounds to form V-NAND devices

Combination CVD/ALD method, source and pulse profile modification

Combination CVD/ALD method, source and pulse profile modification

Photoactive devices and materials

Selective deposition on metal or metallic surfaces relative to dielectric surfaces

Deposition of smooth metal nitride films

Fluorine-containing conductive films

Fluorine-containing conductive films

Photoactive devices and materials

Deposition of oxides and nitrides

Atomic layer etching processes

ASM INT NV

Atomic layer deposition of antimony oxide films

Metal silicide, metal germanide, methods for making the same

Doped metal germanide and methods for making the same

Process for passivating dielectric films

Atomic layer deposition of antimony oxide films

Methods for depositing nickel films and for making nickel silicide and nickel germanide

Crystalline strontium titanate and methods of forming the same

BLOMBERG TOM E

Crystalline strontium titanate and methods of forming the same

Combination CVD/ALD method and source

Process for passivating dielectric films

PORE VILJAMI J

Metal silicide, metal germanide, methods for making the same

Methods for depositing nickel films and for making nickel silicide and nickel germanide

ASM INT

Method of pulsing vapor precursors in an ALD reactor

Atomic layer deposition of antimony oxide films