Inventor
SHARMA VARUN
FI80 patents
⚠️ This page may combine multiple inventors who share the name “SHARMA VARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
39 patentsUS10900120B2Jan 26, 2021
Passivation against vapor deposition
ASM IP HOLDING BV45 citations98
US10453701B2Oct 22, 2019
Deposition of organic films
ASM IP HOLDING BV55 citations98
US10373820B2Aug 6, 2019
Deposition of organic films
ASM IP HOLDING BV61 citations98
US10923361B2Feb 16, 2021
Deposition of organic films
ASM IP HOLDING BV19 citations94
US10854460B2Dec 1, 2020
Deposition of organic films
ASM IP HOLDING BV19 citations94
US10280519B2May 7, 2019
Thermal atomic layer etching processes
ASM IP HOLDING BV14 citations94
US10283319B2May 7, 2019
Atomic layer etching processes
ASM IP HOLDING BV18 citations94
US10273584B2Apr 30, 2019
Thermal atomic layer etching processes
ASM IP HOLDING BV17 citations94
US11387107B2Jul 12, 2022
Deposition of organic films
ASM IP HOLDING BV10 citations86
US11739427B2Aug 29, 2023
Thermal atomic layer etching processes
ASM IP HOLDING BV2 citations84
US10662533B2May 26, 2020
Thermal atomic layer etching processes
ASM IP HOLDING BV3 citations83
US11739428B2Aug 29, 2023
Thermal atomic layer etching processes
ASM IP HOLDING BV1 citations73
US11739422B2Aug 29, 2023
Passivation against vapor deposition
ASM IP HOLDING BV1 citations73
US11728175B2Aug 15, 2023
Deposition of organic films
ASM IP HOLDING BV2 citations73
US11437249B2Sep 6, 2022
Showerhead device for semiconductor processing system
ASM IP HOLDING BV3 citations73
US11396701B2Jul 26, 2022
Passivation against vapor deposition
ASM IP HOLDING BV1 citations73
US11230770B2Jan 25, 2022
Thermal atomic layer etching processes
ASM IP HOLDING BV1 citations73
US11158513B2Oct 26, 2021
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV3 citations73
US11114283B2Sep 7, 2021
Reactor, system including the reactor, and methods of manufacturing and using same
ASM IP HOLDING BV4 citations73
US10662534B2May 26, 2020
Thermal atomic layer etching processes
ASM IP HOLDING BV1 citations73
US10658205B2May 19, 2020
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
ASM IP HOLDING BV2 citations73
US11640899B2May 2, 2023
Atomic layer etching processes
ASM IP HOLDING BV1 citations72
US11230769B2Jan 25, 2022
Thermal atomic layer etching processes
ASM IP HOLDING BV1 citations72
US12320012B2Jun 3, 2025
Thermal atomic layer etching processes
ASM IP HOLDING BV0 citations63
US12312696B2May 27, 2025
Thermal atomic layer etching processes
ASM IP HOLDING BV0 citations63
US12237182B2Feb 25, 2025
Showerhead device for semiconductor processing system
ASM IP HOLDING BV0 citations63
US12142479B2Nov 12, 2024
Formation of SiOCN thin films
ASM IP HOLDING BV0 citations63
US12094686B2Sep 17, 2024
Atomic layer etching processes
ASM IP HOLDING BV0 citations63
US11956977B2Apr 9, 2024
Atomic layer deposition of III-V compounds to form V-NAND devices
ASM IP HOLDING BV0 citations63
US11948813B2Apr 2, 2024
Showerhead device for semiconductor processing system
ASM IP HOLDING BV0 citations63
US11769670B2Sep 26, 2023
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV0 citations63
US11387120B2Jul 12, 2022
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
ASM IP HOLDING BV0 citations63
US11183367B2Nov 23, 2021
Atomic layer etching processes
ASM IP HOLDING BV0 citations63
US11139308B2Oct 5, 2021
Atomic layer deposition of III-V compounds to form V-NAND devices
ASM IP HOLDING BV0 citations63
US12394630B2Aug 19, 2025
In situ generation process and system
ASM IP HOLDING BV0 citations62
US12300505B2May 13, 2025
Deposition of organic films
ASM IP HOLDING BV0 citations62
US12205820B2Jan 21, 2025
Deposition of organic films
ASM IP HOLDING BV0 citations62
US12136552B2Nov 5, 2024
Toposelective vapor deposition using an inhibitor
ASM IP HOLDING BV1 citations62
US12040195B2Jul 16, 2024
Atomic layer etching
ASM IP HOLDING BV0 citations62
GOOGLE INC
3 patentsVISA INT SERVICE ASS
2 patentsCHECHIK GAL
1 patentMICROSOFT TECHNOLOGY LICENSING LLC
1 patentHERBACH JONATHAN
1 patentADOBE INC
1 patentCONDUENT BUSINESS SERVICES LLC
1 patentGOOGLE LLC
1 patentShowing the top 50 of 80 patents by PatentIndex Score.