P

Inventor

SHARMA VARUN

FI80 patents
⚠️ This page may combine multiple inventors who share the name “SHARMA VARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

39 patents
US10900120B2Jan 26, 2021

Passivation against vapor deposition

ASM IP HOLDING BV45 citations98
US10453701B2Oct 22, 2019

Deposition of organic films

ASM IP HOLDING BV55 citations98
US10373820B2Aug 6, 2019

Deposition of organic films

ASM IP HOLDING BV61 citations98
US10923361B2Feb 16, 2021

Deposition of organic films

ASM IP HOLDING BV19 citations94
US10854460B2Dec 1, 2020

Deposition of organic films

ASM IP HOLDING BV19 citations94
US10280519B2May 7, 2019

Thermal atomic layer etching processes

ASM IP HOLDING BV14 citations94
US10283319B2May 7, 2019

Atomic layer etching processes

ASM IP HOLDING BV18 citations94
US10273584B2Apr 30, 2019

Thermal atomic layer etching processes

ASM IP HOLDING BV17 citations94
US11387107B2Jul 12, 2022

Deposition of organic films

ASM IP HOLDING BV10 citations86
US11739427B2Aug 29, 2023

Thermal atomic layer etching processes

ASM IP HOLDING BV2 citations84
US10662533B2May 26, 2020

Thermal atomic layer etching processes

ASM IP HOLDING BV3 citations83
US11739428B2Aug 29, 2023

Thermal atomic layer etching processes

ASM IP HOLDING BV1 citations73
US11739422B2Aug 29, 2023

Passivation against vapor deposition

ASM IP HOLDING BV1 citations73
US11728175B2Aug 15, 2023

Deposition of organic films

ASM IP HOLDING BV2 citations73
US11437249B2Sep 6, 2022

Showerhead device for semiconductor processing system

ASM IP HOLDING BV3 citations73
US11396701B2Jul 26, 2022

Passivation against vapor deposition

ASM IP HOLDING BV1 citations73
US11230770B2Jan 25, 2022

Thermal atomic layer etching processes

ASM IP HOLDING BV1 citations73
US11158513B2Oct 26, 2021

Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures

ASM IP HOLDING BV3 citations73
US11114283B2Sep 7, 2021

Reactor, system including the reactor, and methods of manufacturing and using same

ASM IP HOLDING BV4 citations73
US10662534B2May 26, 2020

Thermal atomic layer etching processes

ASM IP HOLDING BV1 citations73
US10658205B2May 19, 2020

Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber

ASM IP HOLDING BV2 citations73
US11640899B2May 2, 2023

Atomic layer etching processes

ASM IP HOLDING BV1 citations72
US11230769B2Jan 25, 2022

Thermal atomic layer etching processes

ASM IP HOLDING BV1 citations72
US12320012B2Jun 3, 2025

Thermal atomic layer etching processes

ASM IP HOLDING BV0 citations63
US12312696B2May 27, 2025

Thermal atomic layer etching processes

ASM IP HOLDING BV0 citations63
US12237182B2Feb 25, 2025

Showerhead device for semiconductor processing system

ASM IP HOLDING BV0 citations63
US12142479B2Nov 12, 2024

Formation of SiOCN thin films

ASM IP HOLDING BV0 citations63
US12094686B2Sep 17, 2024

Atomic layer etching processes

ASM IP HOLDING BV0 citations63
US11956977B2Apr 9, 2024

Atomic layer deposition of III-V compounds to form V-NAND devices

ASM IP HOLDING BV0 citations63
US11948813B2Apr 2, 2024

Showerhead device for semiconductor processing system

ASM IP HOLDING BV0 citations63
US11769670B2Sep 26, 2023

Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures

ASM IP HOLDING BV0 citations63
US11387120B2Jul 12, 2022

Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber

ASM IP HOLDING BV0 citations63
US11183367B2Nov 23, 2021

Atomic layer etching processes

ASM IP HOLDING BV0 citations63
US11139308B2Oct 5, 2021

Atomic layer deposition of III-V compounds to form V-NAND devices

ASM IP HOLDING BV0 citations63
US12394630B2Aug 19, 2025

In situ generation process and system

ASM IP HOLDING BV0 citations62
US12300505B2May 13, 2025

Deposition of organic films

ASM IP HOLDING BV0 citations62
US12205820B2Jan 21, 2025

Deposition of organic films

ASM IP HOLDING BV0 citations62
US12136552B2Nov 5, 2024

Toposelective vapor deposition using an inhibitor

ASM IP HOLDING BV1 citations62
US12040195B2Jul 16, 2024

Atomic layer etching

ASM IP HOLDING BV0 citations62

GOOGLE INC

3 patents

VISA INT SERVICE ASS

2 patents

CHECHIK GAL

1 patent

MICROSOFT TECHNOLOGY LICENSING LLC

1 patent

HERBACH JONATHAN

1 patent

ADOBE INC

1 patent

CONDUENT BUSINESS SERVICES LLC

1 patent

GOOGLE LLC

1 patent

Showing the top 50 of 80 patents by PatentIndex Score.