Inventor

HAUKKA SUVI

FI82 patents

⚠️ This page may combine multiple inventors who share the name “HAUKKA SUVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAUKKA SUVI

ASM IP HOLDING BV

Aligned carbon nanotubes

Deposition of metal borides

Method for forming Si-containing film using two precursors by ALD

Deposition of metal borides

Method and apparatus for filling a gap

Method for treatment of deposition reactor

Silane and borane treatments for titanium carbide films

Atomic layer etching processes

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Silane or borane treatment of metal thin films

Thermal atomic layer etching processes

Silane or borane treatment of metal thin films

Simultaneous selective deposition of two different materials on two different surfaces

Selective PEALD of oxide on dielectric

Titanium aluminum and tantalum aluminum thin films

Method of making a resistive random access memory

Silane and borane treatments for titanium carbide films

Selective PEALD of oxide on dielectric

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Deposition of metal borides and silicides

Thermal atomic layer etching processes

Organic reactants for atomic layer deposition

ASM INT

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

Method for forming roughened surface

Method of growing oxide thin films

Method of producing thin films

Method of growing electrical conductors

Method of forming an electrode with adjusted work function

Method of growing electrical conductors

Method of growing electrical conductors

Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide

Method of growing oxide thin films

Methods for forming roughened surfaces and applications thereof

Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer

Method for depositing thin films by mixed pulsed CVD and ALD

ASM INT NV

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

Methods for forming doped silicon oxide thin films

ASM MICROCHEMISTRY OY

Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH

Sealing porous structures

HAUKKA SUVI

Methods for depositing thin films comprising gallium nitride by atomic layer deposition

ASM INTERNATIONAL NV

Method of depositing barrier layer for metal gates

KOSTAMO JUHANA

Method of growing electrical conductors