Inventor

TUOMINEN MARKO

FI79 patents

⚠️ This page may combine multiple inventors who share the name “TUOMINEN MARKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TUOMINEN MARKO

ASM IP HOLDING BV

Dual selective deposition

Selective deposition of metals, metal oxides, and dielectrics

Vapor phase deposition of organic films

Dual selective deposition

Vapor phase deposition of organic films

Vapor phase deposition of organic films

Thermal atomic layer etching processes

Atomic layer etching processes

Thermal atomic layer etching processes

Selective passivation and selective deposition

Selective deposition of metals, metal oxides, and dielectrics

Vapor phase deposition of organic films

Selective deposition of metals, metal oxides, and dielectrics

Selective deposition of silicon oxide on metal surfaces

Thermal atomic layer etching processes

Method of making a resistive random access memory

Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces

Thermal atomic layer etching processes

Vapor phase deposition of organic films

Methods for forming a layer comprising a condensing and a curing step

Dual selective deposition

ASM INT

Selective formation of metallic films on metallic surfaces

Method for controlling the sublimation of reactants

Method of growing oxide thin films

System for controlling the sublimation of reactants

Method of forming an electrode with adjusted work function

Selective formation of metallic films on metallic surfaces

Selective deposition of noble metal thin films

Methods for making a dielectric stack in an integrated circuit

Method of growing oxide thin films

Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide

Method of forming ultrathin oxide layer

Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer

Atomic layer deposition of thin films on germanium

Selective deposition of noble metal thin films

ASM INT NV

Selective formation of metallic films on metallic surfaces

Selective formation of metallic films on metallic surfaces

Selective formation of metallic films on metallic surfaces

Selective formation of metallic films on metallic surfaces

Selective deposition of noble metal thin films

ABB RESEARCH LTD

Device for heat treatment of objects and a method for producing a susceptor

Device for epitaxially growing objects and method for such a growth

Device for epitaxially growing objects

ASM MICROCHEMISTRY OY

Method of forming ultrathin oxide layer

Sealing porous structures

ASM INTERNATIONAL NV

Methods for making a dielectric stack in an integrated circuit

HAUKKA SUVI P

Selective formation of metallic films on metallic surfaces

TUOMINEN MARKO

System for controlling the sublimation of reactants

ASM JAPAN

Selective formation of metal layers in an integrated circuit

HUOTARI HANNU

Selective deposition of noble metal thin films