Inventor
GOISHI AKIRA
JP6 patents
Patents
6 patentsUS5640539AJun 17, 1997
IC analysis system having charged particle beam apparatus for improved contrast image
ADVANTEST CORP58 citations94
US5640098AJun 17, 1997
IC fault analysis system having charged particle beam tester
ADVANTEST CORP27 citations91
US5592099AJan 7, 1997
IC tester joined with ion beam tester and the detection method of the failure part of IC
ADVANTEST CORP20 citations90
US5528156AJun 18, 1996
IC analysis system and electron beam probe system and fault isolation method therefor
ADVANTEST CORP27 citations90
US5633595AMay 27, 1997
IC analysis system and electron beam probe system and fault isolation method therefor
ADVANTEST CORP11 citations71
US5589780ADec 31, 1996
IC Analysis system and electron beam probe system and fault isolation method therefor
ADVANTEST CORP11 citations71