Inventor
MACK MICHAEL E
US18 patents
⚠️ This page may combine multiple inventors who share the name “MACK MICHAEL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EPION CORP
5 patentsUS7173252B2Feb 6, 2007
Ionizer and method for gas-cluster ion-beam formation
EPION CORP81 citations97
US7060989B2Jun 13, 2006
Method and apparatus for improved processing with a gas-cluster ion beam
EPION CORP90 citations97
US6831272B2Dec 14, 2004
Gas cluster ion beam size diagnostics and workpiece processing
EPION CORP24 citations91
US6646277B2Nov 11, 2003
Charging control and dosimetry system for gas cluster ion beam
EPION CORP42 citations89
US7060988B2Jun 13, 2006
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
EPION CORP17 citations83
EATON CORP
4 patentsUS5959305ASep 28, 1999
Method and apparatus for monitoring charge neutralization operation
EATON CORP25 citations90
US5240046AAug 31, 1993
Fluid flow control method and apparatus for minimizing particle contamination
EATON CORP15 citations73
US5031674AJul 16, 1991
Fluid flow control method and apparatus for minimizing particle contamination
EATON CORP18 citations73
US4987933AJan 29, 1991
Fluid flow control method and apparatus for minimizing particle contamination
EATON CORP12 citations73