Inventor
IWAMOTO KAZUNORI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “IWAMOTO KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
29 patentsUS5191218AMar 2, 1993
Vacuum chuck
CANON KK146 citations99
US5781277AJul 14, 1998
Projection exposure apparatus and exposure method and semiconductor device production method therewith
CANON KK109 citations98
US5231291AJul 27, 1993
Wafer table and exposure apparatus with the same
CANON KK149 citations98
US5684856ANov 4, 1997
Stage device and pattern transfer system using the same
CANON KK133 citations97
US6819433B2Nov 16, 2004
Exposure apparatus including interferometer system
CANON KK71 citations96
US5909272AJun 1, 1999
Stage and exposure apparatus using same
CANON KK53 citations96
US5483343AJan 9, 1996
Wavelength compensator in a helium ambience
CANON KK100 citations96
US5467720ANov 21, 1995
Support device
CANON KK88 citations96
US6133982AOct 17, 2000
Exposure apparatus
CANON KK26 citations93
US6008885ADec 28, 1999
Scanning exposure apparatus
CANON KK33 citations93
US5168512ADec 1, 1992
Method of manufacture of semiconductor devices
CANON KK26 citations93
US5128975AJul 7, 1992
X-ray exposure system
CANON KK28 citations93
US6717653B2Apr 6, 2004
Moving mechanism in exposure apparatus, and exposure apparatus having the same
CANON KK39 citations92
US6469773B1Oct 22, 2002
Stage apparatus, exposure apparatus and device manufacturing method
CANON KK23 citations92
US5999589ADec 7, 1999
Substrate holding device and exposing apparatus using the same
CANON KK28 citations92
US5933215AAug 3, 1999
Exposure apparatus and device manufacturing method using the same
CANON KK50 citations92
US5883932AMar 16, 1999
Substrate holding device and exposing apparatus using the same
CANON KK38 citations92
US4854444AAug 8, 1989
Precise feeding mechanism
CANON KK36 citations92
US5160961ANov 3, 1992
Substrate holding device
CANON KK19 citations82
US6990386B2Jan 24, 2006
Moving mechanism and stage system in exposure apparatus
CANON KK6 citations74
US6891599B2May 10, 2005
Stage apparatus and exposure apparatus
CANON KK10 citations74
US6069683AMay 30, 2000
Scanning exposure method and apparatus
CANON KK14 citations74
US5226523AJul 13, 1993
Conveying apparatus and method of controlling the same
CANON KK8 citations74
US5687947ANov 18, 1997
Mounting method
CANON KK8 citations73
US5640440AJun 17, 1997
Substrate conveying system
CANON KK6 citations73
US6867849B2Mar 15, 2005
Stage apparatus which supports interferometer, stage position measurement method, projection exposure apparatus, projection exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory
CANON KK5 citations62
US6965428B2Nov 15, 2005
Stage apparatus, exposure apparatus, and semiconductor device manufacturing method
CANON KK5 citations60
US7346414B2Mar 18, 2008
Moving mechanism and stage system in exposure apparatus
CANON KK0 citations52
US6856404B2Feb 15, 2005
Scanning exposure method and apparatus, and device manufacturing method using the same
CANON KK0 citations40