Inventor

NIEN FU-YAO

TW2 patents

Patents

2 patents

US11088262B2Aug 10, 2021

Radical etching in gate formation

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations78

US12382694B2Aug 5, 2025

Radical etching in gate formation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57