Inventor
TOMOEDA TAKAYUKI
JP11 patents
Patents
11 patentsUS5871584AFeb 16, 1999
Processing apparatus and processing method
TOKYO ELECTRON LTD162 citations99
US5965200AOct 12, 1999
Processing apparatus and processing method
TOKYO ELECTRON LTD73 citations96
US5779796AJul 14, 1998
Resist processing method and apparatus
TOKYO ELECTRON LTD95 citations96
US5518552AMay 21, 1996
Method for scrubbing and cleaning substrate
TOKYO ELECTRON LTD54 citations95
US5488964AFeb 6, 1996
Washing apparatus, and washing method
TOKYO ELECTRON LTD45 citations95
US5345639ASep 13, 1994
Device and method for scrubbing and cleaning substrate
TOKYO ELECTRON LTD67 citations95
US5626913AMay 6, 1997
Resist processing method and apparatus
TOKYO ELECTRON LTD67 citations94
US5887604AMar 30, 1999
Washing apparatus, and washing method
TOKYO ELECTRON LTD21 citations92
US5782990AJul 21, 1998
Method for washing objects
TOKYO ELECTRON LTD23 citations92
US5671764ASep 30, 1997
Washing apparatus, and washing method
TOKYO ELECTRON LTD21 citations92
US5759614AJun 2, 1998
Resist processing method and apparatus
TOKYO ELECTRON LTD5 citations72