Inventor
WALSH THOMAS A
US15 patents
⚠️ This page may combine multiple inventors who share the name “WALSH THOMAS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
STRASBAUGH
7 patentsUS5964646AOct 12, 1999
Grinding process and apparatus for planarizing sawed wafers
STRASBAUGH76 citations94
US8968052B2Mar 3, 2015
Systems and methods of wafer grinding
STRASBAUGH6 citations72
US9393669B2Jul 19, 2016
Systems and methods of processing substrates
STRASBAUGH5 citations68
US7156946B2Jan 2, 2007
Wafer carrier pivot mechanism
STRASBAUGH2 citations61
US7040955B1May 9, 2006
Chemical-mechanical planarization tool force calibration method and system
STRASBAUGH5 citations54
US9610669B2Apr 4, 2017
Methods and systems for use in grind spindle alignment
STRASBAUGH0 citations50
US9082713B2Jul 14, 2015
Method of grinding wafer stacks to provide uniform residual silicon thickness
STRASBAUGH0 citations42