Inventor
PANDEY PRADEEP
US26 patents
⚠️ This page may combine multiple inventors who share the name “PANDEY PRADEEP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS7101816B2Sep 5, 2006
Methods for adaptive real time control of a thermal processing system
TOKYO ELECTRON LTD33 citations92
US7025280B2Apr 11, 2006
Adaptive real time control of a reticle/mask system
TOKYO ELECTRON LTD41 citations92
US6803548B2Oct 12, 2004
Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus
TOKYO ELECTRON LTD36 citations92
US6730885B2May 4, 2004
Batch type heat treatment system, method for controlling same, and heat treatment method
TOKYO ELECTRON LTD23 citations92
US7452793B2Nov 18, 2008
Wafer curvature estimation, monitoring, and compensation
TOKYO ELECTRON LTD15 citations84
US7165011B1Jan 16, 2007
Built-in self test for a thermal processing system
TOKYO ELECTRON LTD11 citations82
US7519885B2Apr 14, 2009
Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table
TOKYO ELECTRON LTD7 citations74
US7838072B2Nov 23, 2010
Method and apparatus for monolayer deposition (MLD)
TOKYO ELECTRON LTD7 citations63
US7526699B2Apr 28, 2009
Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system
TOKYO ELECTRON LTD5 citations63
US7459175B2Dec 2, 2008
Method for monolayer deposition
TOKYO ELECTRON LTD2 citations63
US7444572B2Oct 28, 2008
Built-in self test for a thermal processing system
TOKYO ELECTRON LTD4 citations63
US7406644B2Jul 29, 2008
Monitoring a thermal processing system
TOKYO ELECTRON LTD4 citations63
US7340377B2Mar 4, 2008
Monitoring a single-wafer processing system
TOKYO ELECTRON LTD2 citations63
US7302363B2Nov 27, 2007
Monitoring a system during low-pressure processes
TOKYO ELECTRON LTD6 citations63
US6847015B2Jan 25, 2005
Heat treatment apparatus and controller for heat treatment apparatus and control method for heat treatment apparatus
TOKYO ELECTRON LTD2 citations62
VOYAN TECHNOLOGY
9 patentsUS5991525ANov 23, 1999
Method for real-time nonlinear system state estimation and control
VOYAN TECHNOLOGY186 citations99
US6285971B1Sep 4, 2001
Method for real-time nonlinear system state estimation and control
VOYAN TECHNOLOGY119 citations98
US6289255B1Sep 11, 2001
Method for computer-aided design of a product or process
VOYAN TECHNOLOGY20 citations92
US6289508B1Sep 11, 2001
Method and apparatus for dynamic optimization
VOYAN TECHNOLOGY31 citations92
US6195594B1Feb 27, 2001
Real-time planner for design
VOYAN TECHNOLOGY20 citations92
US6167360ADec 26, 2000
Method and apparatus for dynamic optimization
VOYAN TECHNOLOGY27 citations92
US5880959AMar 9, 1999
Method for computer-aided design of a product or process
VOYAN TECHNOLOGY44 citations92
US6452291B1Sep 17, 2002
Reduction of switching transients via large signal/small signal thresholding
VOYAN TECHNOLOGY8 citations73
US6041172AMar 21, 2000
Multiple scale signal processing and control system
VOYAN TECHNOLOGY9 citations73