Inventor

NAKAO SHUJI

JP45 patents

⚠️ This page may combine multiple inventors who share the name “NAKAO SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKAO SHUJI

MITSUBISHI ELECTRIC CORP

Method of surface processing

Phase shift mask, method of manufacturing phase shift mask and method of forming a pattern using phase shift mask

Aligner and patterning method using phase shift mask

Pattern forming method using phase shift mask

Surface processing device

Aligner and patterning method using phase shift mask

Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask

Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask

Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask

Apparatus utilizing charged particles

Phase shift mask, method of manufacturing a phase shift mask and method of forming a pattern with phase shift mask

Phase shift mask, blank for phase shift mask, and method of manufacturing phase shift mask

Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask

Method for formation of semiconductor device pattern, method for designing photo mask pattern, photo mask and process for photo mask

Fine patterning utilizing an exposure method in photolithography

Projection aligner and exposure method using the same

Phase shift mask and its manufacturing method and semiconductor device and its manufacturing method using the phase shift mask

Ionized PVD device and method of manufacturing semiconductor device

Monitoring method and apparatus of surface area of semiconductor wafer

Process for manufacturing stacked semiconductor devices

Patterned figure resolution verification method and semiconductor pattern forming method

Projection aligner and exposure method using the same

Process for fabricating a semiconductor integrated circuit utilizing an exposure method

Method and apparatus for manufacturing photomask and method of manufacturing a semiconductor device

Photomask and photomask blank

Method and apparatus for manufacturing photomask and method of manufacturing a semiconductor device

Aligner having shared rotation shaft

RENESAS TECH CORP

Method for formation of semiconductor device pattern, method for designing photo mask pattern, photo mask and process for photo mask

Focus monitoring method, focus monitoring system, and device fabricating method

Photomask for aberration measurement, aberration measurement method unit for aberration measurement and manufacturing method for device

Focus monitoring method, focus monitoring apparatus, and method of manufacturing semiconductor device

Pattern forming method, semiconductor device manufacturing method and exposure mask set

Phase shift mask, method for forming pattern using phase shift mask and manufacturing method for electronic device

Pattern forming method and method of fabricating device

Photomask for focus monitoring

Method for formation of semiconductor device pattern, method for designing photo mask pattern, photo mask and process for photo mask

Pattern forming method, semiconductor device manufacturing method and exposure mask set

Method of focus monitoring and manufacturing method for an electronic device

MINOLTA CO LTD

Data administration apparatus that can search for desired image data using maps

Data processing apparatus, print-setting method, and recording medium

Image reproduction apparatus and method for controlling image reproduction apparatus

Computer program product executed in server computer connected to printer and client computer, and printer function description file editing method

RENESAS ELECTRONICS CORP

Pattern forming method, electronic device manufacturing method and electronic device

Pattern forming method, semiconductor device manufacturing method and exposure mask set

KONICA MINOLTA BUSINESS TECH

Printing control device and image forming device