Inventor

PILCHOWSKI JORG

US2 patents

Patents

2 patents

US7690254B2Apr 6, 2010

Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate

HONEYWELL INT INC18 citations79

US7410901B2Aug 12, 2008

Submicron device fabrication

HONEYWELL INT INC2 citations54