Inventor
THORNPSON JEFFERY SCOTT
US2 patents
Patents
2 patentsUS7268365B2Sep 11, 2007
Volatile copper (II) complexes and reducing agents for deposition of copper films by Atomic Layer Deposition
DU PONT5 citations69
US7087774B2Aug 8, 2006
Volatile copper(II) complexes and reducing agents for deposition of copper films by atomic layer deposition
DU PONT2 citations58