Inventor

KISHIMOTO TAKANORI

JP3 patents

Patents

3 patents

US10971328B2Apr 6, 2021

Charged particle beam device

HITACHI HIGH TECH CORP0 citations59

US10734191B2Aug 4, 2020

Charged particle beam device

HITACHI HIGH TECH CORP1 citations59

US11501950B2Nov 15, 2022

Charged particle beam device

HITACHI HIGH TECH CORP0 citations44