Inventor
YAKUSHIJI HIROSHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “YAKUSHIJI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
8 patentsUS11289305B2Mar 29, 2022
Deposition method and deposition apparatus
CANON ANELVA CORP2 citations67
US12438075B2Oct 7, 2025
Method for manufacturing a laminated body
CANON ANELVA CORP0 citations58
US10917960B2Feb 9, 2021
Deposition apparatus
CANON ANELVA CORP0 citations58
US11810748B2Nov 7, 2023
Ion gun and vacuum processing apparatus
CANON ANELVA CORP0 citations55
US11600295B2Mar 7, 2023
Vacuum process apparatus and vacuum process method
CANON ANELVA CORP0 citations50
US10971332B2Apr 6, 2021
Plasma processing apparatus and plasma processing method
CANON ANELVA CORP0 citations49
US10731245B2Aug 4, 2020
Vacuum arc deposition apparatus and deposition method
CANON ANELVA CORP0 citations36
US10626494B2Apr 21, 2020
Plasma CVD apparatus and vacuum treatment apparatus
CANON ANELVA CORP0 citations33