Inventor

NAKAYAMA YOSHINORI

JP73 patents

⚠️ This page may combine multiple inventors who share the name “NAKAYAMA YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKAYAMA YOSHINORI

HITACHI LTD

Method of fabricating semiconductor circuit devices utilizing multiple exposures

Charged particle beam lithography apparatus for forming pattern on semi-conductor

Wafer transport method

Electron beam lithography system and method

Electron beam lithography system and method

Electron beam lithography system and method

Electron beam writing system used in a cell projection method

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Electron beam lithography apparatus and pattern forming method

Electron beam writing system

Wafer transport method

Electron beam lithography apparatus having electron optics correction system

Combination apparatus having a scanning electron microscope therein

Aperture plate and a method of manufacturing the same

Electron beam monitoring sensor and electron beam monitoring method

Charged particle beam lithography apparatus for forming pattern on semi-conductor

Charged particle beam lithography apparatus for forming pattern on semi-conductor

Charged particle beam lithography apparatus for forming pattern on semi-conductor

Schedule retrieval method for controlling schedules and schedule server apparatus with multistageous idle-time retrieval means

Charged particle beam lithography method and apparatus thereof

Method and apparatus for electron beam lithography

Charged beam exposure method and apparatus as well as aperture stop and production method thereof

Crystal monochromator

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI HIGH TECH CORP

Ion beam system and machining method

Standard reference for metrology and calibration method of electron-beam metrology system using the same

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector

Ion beam system and machining method

Standard component for calibration and electron-beam system using the same

Measurement method of electron beam current, electron beam writing system and electron beam detector

Standard member for length measurement, method for producing the same, and electron beam length measuring device using the same

Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus

Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member

Standard component for length measurement, method for producing the same, and electron beam metrology system using the same

Electron beam writing system and electron beam writing method

Charged particle beam orbit corrector and charged particle beam apparatus

Standard component for calibration and calibration method using it and electro beam system

Calibration method for electron-beam system and electron-beam system

CANON KK

Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method

Method of charged particle beam lithography and equipment for charged particle beam lithography

Electron beam exposure apparatus and electron beam measurement module

Electron beam writing equipment and electron beam writing method

NAKAYAMA YOSHINORI

Standard member for calibration and method of manufacturing the same and scanning electron microscope using the same

Standard member for correction, scanning electron microscope using same, and scanning electron microscope correction method

SONY CORP

Reduced thickness optical image pickup device with improved sealing and method of making same

NIPPON SOKEN

Process for producing piezoelectric ceramic sheet and dielectric ceramic sheet

SANYO ELECTRIC CO

Nickel-chromium stainless steel having improved corrosion resistances and machinability

SUMITOMO CHEMICAL CO

Process for producing cyclobutanones